This paper characterizes the relationship between applied force and reflectance/transmittance of a terahertz frequency selective surface for use as a sensor in structural health monitoring. Numerical modelling of both the mechanical and electromagnetics, solving the elasticity equation and Maxwell’s equations, respectively, has been undertaken for a 3 layer device. The unit cell comprises of a metal cross wire embedded within a (hard) silicon substrate, interleaved with stacks of (soft) low density polyethylene.

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THz,Metamaterials,FSS,MEMS,SHM